Homework 07

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CBE 179 Homework - Lithography

Due Monday, 2013.11.03

Write a brief summary (1-2 paragraphs) for each technique, discussing the importance of the technique, how it is performed, and its current and future status in industry. Cite your sources.

The Techniques

  • Chemically Amplified Resist
  • Immersion Lithography
  • Optical Proximity Correction
  • Phase Shift Masks
  • Double (Multiple) Patterning
  • Nanoimprint Lithography (what different kinds are there?)
  • Extreme UV Lithography (what wavelengths? why is this technique so difficult to perform?)
  • Direct-Write (electron, proton beam) Lithography
  • Dip-Pen Nanolithography

Lithography expert Chris Mack's lectures may be useful.