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Homework 08 - Plasma Processing Applications
Due Wednesday, 2014.11.05.
Write a brief summary (1-2 paragraphs) for each technique, discussing the importance of the technique, how it is performed, and its current and future status in industry. Cite your sources.
- Plasma Etching
- Plasma CVD
- Plasma Sputtering
- Plasma Cleaning
- Plasma Photoresist Stripping
- Optical Emission Spectroscopy (as a plasma diagnostic; also used for metals analysis)
- Actinometry (as a plasma diagnostic; also used in meteorology)