Homework 08

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Homework 08 - Plasma Processing Applications

Due Wednesday, 2014.11.05.

Write a brief summary (1-2 paragraphs) for each technique, discussing the importance of the technique, how it is performed, and its current and future status in industry. Cite your sources.

The Techniques

  • Plasma Etching
  • Plasma CVD
  • Plasma Sputtering
  • Plasma Cleaning
  • Plasma Photoresist Stripping
  • Optical Emission Spectroscopy (as a plasma diagnostic; also used for metals analysis)
  • Actinometry (as a plasma diagnostic; also used in meteorology)