Lithography

From CBE179 Wiki
Jump to: navigation, search

Techniques[edit]

As we talk more about lithography, you may get the sense that this topic could be its own class (which might be the theme of this course). A few of the techniques mentioned today:

   http://en.wikipedia.org/wiki/Photolithography
   http://en.wikipedia.org/wiki/Photomask
   http://en.wikipedia.org/wiki/Contact_lithography
   http://en.wikipedia.org/wiki/Immersion_lithography
   http://en.wikipedia.org/wiki/Phase-shift_mask
   http://en.wikipedia.org/wiki/Multiple_patterning
   http://en.wikipedia.org/wiki/Extreme_ultraviolet_lithography
   http://en.wikipedia.org/wiki/Electron-beam_lithography
   http://en.wikipedia.org/wiki/Maskless_lithography

Additional Resources[edit]

If you'd like more background on lithography, Chris Mack is an industry expert and half of his course (lectures 38 through 67) is about lithography: https://www.youtube.com/watch?v=TdwUGOxCdUc&list=PLM2eE_hI4gSDjK4SiDbhpmpjw31Xyqfo_&index=39