Plasma Physics

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Introduction[edit]

Lecture date: Wednesday, 2014.10.29 (lecture recording)

Plasma Physics[edit]

The equilibrium condition of the plasma is that charges are generated in the volume due to ionization as quickly as they are lost due to recombination events and collisions at the wall. For the relatively low-density plasmas typically used in plasma etching, wall collisions dominate the loss processes.

David Bohm

Bohm Criterion

Bohm Velocity

Ambipolar Diffusion