Semiconductors @ Berkeley
Dr. Graves mentioned that Berkeley has a plethora of researchers working on lithography. To list just a few:
- Andrew Neureuther, EECS - "simulation of optical, electron, ion beam and x-ray lithography; assessment of residual effects of defects and lens aberrations"
- David Attwood, EECS - "Electromagnetics at short wavelengths, particularly soft x-ray and extreme ultraviolet radiation, x-ray optics, the generation of coherent radiation at EUV and soft x-ray wavelengths, and applications to microscopy and lithography."
- William Oldham, EECS - "Fabrication of parallel-plate nanomirror arrays for extreme ultraviolet maskless lithography"
- Jeffrey Bokor, EECS - "Maskless lithography using drop-on-demand inkjet printing method"
- Avideh Zakhor, EECS - "Reduced complexity compression algorithms for direct-write maskless lithography systems"
semiconductor-related seminar series EE 298-08 and EE 298-12. The schedules are available here:
Some of these seminar topics look QUITE advanced, but some of them should be understandable and might be interesting to you:
Friday, October 24th "Future Chip Technology Scaling for Big Data and Cloud Computing" http://microlab.berkeley.edu/text/seminars/10-24-14.pdf Friday, October 31st "Atomic-precision Control of Single-crystalline 2D Materials & Recent Progress on Thin Film Photovoltaics in IBM" http://microlab.berkeley.edu/text/seminars/10-31-14.pdf
If you've been to any of these seminars, I'd love to hear how they were. More seminars can be found on the EECS departmental calendar: http://www.eecs.berkeley.edu/cal/