Term Paper

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You will research and prepare a paper on a topic of your choice. The paper must include details of how the subject is manufactured or how it relates to semiconductor manufacturing.

To get a better idea of the expectations, read the sample term paper.

For painless reference management and automatic bibliography generation, consider using Mendeley.

Don't plagiarize. The term paper must be an original piece of work; plagiarized papers will receive zero credit.

Suggested Topics

This list is by no means all-encompassing, and you are absolutely welcome to request any topic of interest!

  • low k dielectrics (porous, organic polymer, air gap)
  • high k gate dielectrics
  • optical interconnects
  • lithography:
    • EUV
    • immersion 193
    • soft imprint nanolithography
  • Resist technology and processing
    • Line edge roughness
    • Etch resistance
  • Novel FET devices: FinFET, Intel’s tri-gate
  • compound semiconductor processing and devices
  • heterogeneous integration
  • optoelectronics
  • plasma etch
    • gate electrodes
    • dielectrics
  • cluster tools
  • chemical mechanical polishing/planarization
  • electrochemical deposition
  • packaging technology
  • carbon nanotube devices: transistors and interconnect material
  • silicon nanowires
  • 3-D devices
  • wafer bonding
  • process control and sensors
  • metrology
  • 450 mm diameter wafers
  • flat panel active matrix liquid crystal displays
  • solar cells
  • plastic electronics
  • organic light emitting diodes (OLEDs)
  • advanced magnetic storage devices: thin film magnetics
  • contamination and clean rooms
  • environmental, safety and health
    • toxic and hazardous waste to environment
    • worker health and safety
    • affluent abatement
    • Perflourocompounds
  • ultraclean water use in IC manufacturing
  • Microelectromechanical (MEMs) devices
  • Micro-sensors and actuators
  • Biomedically implanted devices

Dr. Graves adds some more plasma-related topics:

  • Nanoparticle synthesis
  • Commercial products: plasma displays, plasma lighting
  • Natural plasmas: ionosphere (space weather; impact on communication), aurora, lightning, stars, atmospheric electricity (e.g. 'sprites', 'ball lightning')
  • Fusion
  • Lasers
  • Plasma medicine
  • Plasma food/agriculture (disinfection; nitrogen fixation via Birkeland-Eyde)
  • Plasma electrochemistry (e.g. ozone generation)
  • Plasma welding
  • Plasma materials processing (e.g. textile modification)
  • Plasma treatment of industrial and residential waste (e.g. for biochar production)

Brandon thinks up a few:

  • The "terahertz gap"
  • Photocatalytic water splitting
  • Monolithic microwave integrated circuits
  • Insulated gate bipolar transistors
  • Magnetrons
  • On-chip optical interconnects
  • Silicon-on-Insulator
  • Quantum computing
  • Chemical computing
  • DNA computing
  • Flexible electronics
  • Biodegradable electronics
  • "E-waste"
  • Memristors

For more inspiration, check out Materials Research Bulletin and back-issues of semiconductor trade journals on Google Drive, or a list of electrical-related Nobel prizes. Seriously!, pick something cool.